A TTP4 cryogenic manipulated-proble station is used for non-destructive electrical testing of devices on full and partial wafers up to 2 inches in diameter. Cryogenic operation is based on a continuous-tranfer cryogenic refrigerator specifically for the TTP. The station has a custom designed window and double-fiber optical probe, and the temperature can be varied from 4.2 K to 300 K
Low-temperature probe station
Facilities, Testing
